Alicat MC Series Mass Flow Controller Manual do Utilizador

Consulte online ou descarregue Manual do Utilizador para Sensores Alicat MC Series Mass Flow Controller. Alicat MC Series Mass Flow Controller User Manual Manual do Utilizador

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Precision Gas Mass Flow Controllers
The Fastest Flow Controller Company in the World!
Operating Manual
MC-Series
MCS-Series
MCR-Series
WHISPER
MCV-Series
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Resumo do Conteúdo

Página 1 - Operating Manual

Precision Gas Mass Flow ControllersThe Fastest Flow Controller Company in the World!Operating ManualMC-SeriesMCS-SeriesMCR-SeriesWHISPERMCV-Series

Página 2 - ACCESSORIES



Página 3

OUTPUT SIGNALS

Página 4

CAUTION

Página 5

 

Página 6 - MOUNTING

#C+21.50 +0.00 CCM MENUSETPT0.000 SCCMAirPSIA+13.60 +0.00 SCCMMain+0.00SETPT0123.4MENUSLPM+123.4TOTAL/ TIMERBATCH RESET0000:09:59 SCC00

Página 7 - PLUMBING

MAIN  

Página 8 - POWER AND SIGNAL CONNECTIONS



Página 9 - INPUT SIGNALS

SELECT MENU

Página 10 - 

CONTROL SETUP Control Setup

Página 11

CAUTION! 

Página 12

06/04/2014 Rev.34 DOC-ALIMAN16CRECALIBRATIONYour Alicat instrument is a precision device and Alicat strongly recommends that you send

Página 13

PID TUNING

Página 14 - 00123.45

PD 

Página 15

GAS SELECTGas SelectGAS SELECT

Página 16

COMMUNICATION SELECT RS232 COMM COMM Select MenuUnit ID

Página 17 - SELECT MENU

MISCELLANEOUS MiscellaneousMISCMISC1MISC2. MISC1

Página 18 - CONTROL SETUP

MISC2STP

Página 19

BACK MAINSCROLLR8: AP Sig 7871R9: Temp Sig 39071R10: DP Side 9986R11: DP Brdg 36673R13: AP Brdg 36673R16: Meter Fun 199R1

Página 20



Página 21

MCD 

Página 22 - GAS SELECT

FLOWBack

Página 23 - COMMUNICATION SELECT

3Thank you for purchasing an Alicat Gas Flow Controller. 

Página 24 - MISCELLANEOUS

 

Página 25



Página 26 - MANUFACTURER DATA



Página 27 - Air Supply

33Gas Select              

Página 28

34                  

Página 29 - 



Página 30

  

Página 31

       

Página 32

GasNumberShort FormLong FormViscosity*25 deg C 14.696 psiaDensity**25 deg C 14.696 psiaCompressibility 25 deg C 14.696 psia0 Air Air 184.918 1.1840

Página 33

GasNumberShort FormLong FormViscosity*0 deg C 14.696 psiaDensity**0 deg C 14.696 psiaCompressibility 0 deg C 14.696 psia0 Air Air 172.588 1.2927 0.9

Página 34

4TABLE OF CONTENTS Page     

Página 35

TROUBLESHOOTING

Página 36



Página 37



Página 38 - (NIST REFPROP 7 database)

43

Página 39

44BATCH PROCESSING MODE – CONTROLLERS ONLY           

Página 40



Página 41



Página 42

 

Página 43

Accessories   

Página 44

     

Página 45

TABLE OF CONTENTS Page   

Página 46 - BB-9 Multi-Drop

Technical Data for Alicat MC and MCR Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full ScaleStandard Operating Specications

Página 47 - 

  MC-Series:0 - 100 sccm0 - 200 sccm0 - 500 sccm0

Página 48 - Accessories

  

Página 49

   

Página 50 - 2000 slpm controllers.)

      

Página 51 - 

Technical Data for Whisper Low Pressure Drop Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 500 slpm Full ScalePerformance Whisper MCW &

Página 52 - 

WHISPER MCW:0 - 0.5 sccm0 - 1 sccm0 - 2 sccm0 - 5 sccm0 - 10 sccm0 - 20 sccmMCW 0.5 sccm to 20 sccm approximate shipping weight: 1.1 lb.WHISPER MCW:

Página 53 - 

   

Página 54 - 0 - 3000 slpm

    

Página 55 - Range Specic Specications

Technical Data for MCV & MCVS Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 20 slpm Full ScaleMCV

Página 56 - 

GETTING STARTED

Página 57 - 

 MCV-SeriesAll rangesMCV approximate weight: 3.0 lb.

Página 58 -  

Technical Data for MCP Moderate Flow Mass Flow Controllers0 to 50 slpm Full Scale through 0 to 250 slpm Full ScaleAlicat MCP mass ow controllers ar

Página 59

   

Página 60 - MCVS-Series

Technical Data for Alicat MCD and MCRD Dual Valve Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full ScaleStandard Operating

Página 61

MCD-Series0 - 20 slpm shown    

Página 62 - 

Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers

Página 63

MCS-Series:0 – 0.5 sccm0 – 1 sccm0 – 2 sccm0 – 5 sccm0 – 10 sccm0 – 20 sccm0 – 50 sccmMCS-Series:0 – 100 sccm0 – 200 sccm0 – 500 sccm0 – 1 slpm0 – 2

Página 64 - 0 - 2000 slpm shown

  

Página 65

MCRS-Series:0 – 500 slpm0 – 1000 slpm0 – 1500 slpmMCRS-Series:0 – 2000 slpmMCRS 500 slpm to 1500 slpm approximate weight: 9.0 lb. MCRS 2000 slpm app

Página 66

   

Página 67 - 0 – 250 slpm

PLUMBING

Página 68

SpecicationMeter or GaugeSmall ValveControllerLarge ValveControllerDescriptionInput /Output Signal Digital PROFIBUS DPElectrical Connections DB9Su

Página 69 -   

Eight Pin Mini-DIN Connector Pin-OutsIf your Alicat Instrument was ordered with the standard Eight Pin Mini-DIN connection, please be sure to refere

Página 70 - MC-1SLPM-PROFIBUS

   520-290-6060 Ph. 520-290-0109 Fax

Página 71

Pin  3 

Página 72 - Rev. No. Description Date



Página 73 - Standard DB9 Pin-out



Página 74 - DB9A Pin-out



Página 75 - DB9N Pin-out



Página 76 - DB9R Pin-out



Página 77 - DB9T Pin-out

DB15 – Pin-Out Alicat StylePin Number Function1 Ground2 Primary Analog Signal Output3 Ground4 N/C5 Power Supply (+Vdc)6 N/C7 N/C8 Analog Tare (meter

Página 78 - DB9U Pin-out

POWER AND SIGNAL CONNECTIONS

Página 79 - DB15 Pin-Outs

Pin Number Function1 Ground2 Primary Analog Signal Output3Analog Tare (meters — when grounded)*Analog Set-Point Input (controllers)*4 Ground5 Power

Página 80

DB15B – Pin-Out “Brooks” StylePin Number Function1 Ground2 Primary Analog Signal Output3 N/C4 N/C5 Power Supply (+Vdc)6 N/C7 N/C8Analog Tare (meters

Página 81

DB15K – Pin-Out “MKS” StyleThe following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 w

Página 82 - DB15K – Pin-Out “MKS” Style

DB15H – Pin-Out “Hastings H” StylePin Number Function1 N/C2 RS-232 RX (receive) or RS-485 – *3 N/C4 N/C5 Ground6 Primary Analog Signal Output7 Power

Página 83

DB15S – Pin-Out “Sierra” StylePin Number Function1 Ground2 Primary Analog Signal Output 3 N/C4 N/C5 Ground6 N/C7 N/C8Analog Tare (meters — when grou

Página 84

Additional Information for Alicat CSA and ATEX Approved DevicesSee the following page for Special Conditions regarding the use of these units!EEx nA

Página 85 - WARNINGS:

USE of Alicat instruments (M, MW, MS, MC, MCW, MCS, MCR, MCRW, MCRS, P, PS, PC, PCS, PCR and PCRS product families only) in Class 1 Division 2 appl

Página 86 - Tel: 520-290-6060

Serial Number: ______________________Model Number: _________________________Notice: Alicat Scientic, Inc. reserves the right to make any changes and

Página 87 - Limited Lifetime Warranty

alicat.com The Fastest Flow Controller Company in the World!#GasAbsoluteViscosity*25°C Density **25°C14.696 psiaCompressibility 25°C14.696 psia0 Ai

Página 88 - Tucson AZ 85743 USA

INPUT SIGNALSAnalog Input Signal

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