Alicat MC Series Mass Flow Controller Manual do Utilizador Página 65

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Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers





 
 

     





Air Air
1 Argon Ar
2 Methane 
3  CO
 CO2
5 Ethane 
Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane 
 Acetylene C2H2
15 Ethylene 
 iso-Butane 
17 Krypton Kr
18  
19  
  C-25
21  
22  C-8
23  C-2
  C-75
25  A-75
  A-25
27

2.5% CO2


28

2% O2

Star29
29  P-5
 Nitric Oxide NO
31  NF3
32 Ammonia NH3
  H2S
 Propylene 



in an inert carrier
NO2


carrier


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